PVD Products, Inc. provide thin film deposition
tools for material scientists and process engineers. The company has a well-established
reputation for its integrated physical vapour deposition systems and component
products.
PVD Products, Inc. was founded in 1995 by Dr James A Greer who had developed
significant experience in Pulsed Laser Deposition whilst at Raytheon's Research
Division. The ability to scale up the PLD process for 200 mm deposition areas
had been demonstrated on prototype equipment. In an early contract for the
company, PVD Products developed a 5 inch diameter substrate system to grow
HTS materials which demonstrated high quality YBCO on LaAlO3 substrates up
to 100 mm diameter. PVD Products now provides customers with state-of-the-art
PLD equipment and the PLD 2000 and the smaller Nano PLD systems are operating
routinely in labs worldwide.
The PLD 2000 system has met the needs of a number of our European customers
and provides future flexibility for the addition of magnetron sputtering
sources and in-situ analytical techniques. The "laser MBE" technique of
monolayer by monolayer growth relies on RHEED. Our principals STAIB
Instrumente GmbH and k-Space Associates, Inc. have respectively the electron
gun technology and the analytical RHEED packages to support this research.
As well as laser MBE, other new PLD techniques are being developed and PVD
Products has established solutions for combinatorial PLD and Matrix Assisted
Pulsed-Laser Evaporation (MAPLE).
In addition the company offers:
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PLD Components including Target Manipulators and Intelligent Windows
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Electron-beam Evaporation Systems
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Magnetron and/or Ion Beam Sputtering Systems
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Combination Deposition Systems
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Custom Substrate Heaters
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All PVD Products' systems are designed to meet the customer's specific requirements
and to provide ease of use.
RTA Instruments provides local European installation and technical support
for the PVD product lines.
