Following my retirement, we have closed our company for new business.

Please do not hesitate to contact me directly, our email portal remeains open and I would be delighted to hear from you and provide ongoing support or advice.

Richard Thomson

support@rta-instruments.com

Companies represented up to the end of December 2023. Please now contact them directly.

k-Space Associates, Inc.
Phone: +1 (734) 426-7977
requestinfo@k-space.com
https://www.k-space.com

STAIB INSTRUMENTS GmbH
Phone: +49 8761 76 24 0
sales@staibinstruments.com
https://www.staibinstruments.com/

Monday 5 August 2013

Challenges for lithography

According to Ajit Manocha of GlobalFoundries, keynote speaker at last month’s Semicon West, 20nm lithography equipment now comprises a staggering 85% of the cost of a new fab. No wonder that the ever present drive to deliver on Moore's Law is causing angst. On one hand we have the chip manufacturers bemoaning costs and missed technology deadlines. On the other those trying to produce the next generation of lithography equipment have real technological issues in the complexities (or impossibilities) in further extending immersion multiple patterning or the lack of suitable power sources for EUV lithography. Creating a roadmap is one thing but delivering is another matter.

No comments:

Post a Comment