Thought for the month

“You always own the option of having no opinion. There is never any need to get worked up or to trouble your soul about things you can't control. These things are not asking to be judged by you. Leave them alone.”
Marcus Aurelius Antonius, Emperor and Stoic philosopher (121-180).

Monday, 5 August 2013

Challenges for lithography

According to Ajit Manocha of GlobalFoundries, keynote speaker at last month’s Semicon West, 20nm lithography equipment now comprises a staggering 85% of the cost of a new fab. No wonder that the ever present drive to deliver on Moore's Law is causing angst. On one hand we have the chip manufacturers bemoaning costs and missed technology deadlines. On the other those trying to produce the next generation of lithography equipment have real technological issues in the complexities (or impossibilities) in further extending immersion multiple patterning or the lack of suitable power sources for EUV lithography. Creating a roadmap is one thing but delivering is another matter.

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