“It is easier to criticise than to correct our past errors.” Titus Livius, Historian (c64 BC- c12 AD)
Monday, 10 February 2014
Curvature measurement in France
k-Space Associates, Inc. have delivered 2 kSA MOS systems in France, to CEMES in Toulouse and IM2NP in Marseille. CEMES plan to measure plastic deformation of thin films on rigid substrates and eventually the fatigue of metallisation layers on microelectronics devices in the temperature range of 100-800K. IM2NP will use the system to measure stress during ALD or CVD growth of thin oxide films whilst simultaneously measuring crystal structure by GIXRD - at the SOLEIL synchrotron.