Following my retirement, we have closed our company for new business.

Please do not hesitate to contact me directly, our email portal remeains open and I would be delighted to hear from you and provide ongoing support or advice.

Richard Thomson

support@rta-instruments.com

Companies represented up to the end of December 2023. Please now contact them directly.

k-Space Associates, Inc.
Phone: +1 (734) 426-7977
requestinfo@k-space.com
https://www.k-space.com

STAIB INSTRUMENTS GmbH
Phone: +49 8761 76 24 0
sales@staibinstruments.com
https://www.staibinstruments.com/

Friday 16 April 2010

Critical dimensions

With ever shrinking dimensions within ICs, the role of metrology in maintaining high yield is critical. Researchers are challenged to get accurate measurements of sub-40nm dense trenches and contact holes coming from 193-immersion lithography or e-beam lithography. CEA-Leti's (www.leti.fr) Hybrid Metrology Project has shown noteworthy results in reducing measurement uncertainty at sub-28nm nodes using an alternative 3D-AFM (atomic force microscope) mode for critical measurements (nanotechwire.com/news.asp?nid=9645). The team aims to help equipment makers develop a critical dimension metrology production tool dedicated to hybrid metrology that will reduce R&D cycle time and improve production yield for manufacturers.

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